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HexScan 2150SXE



Anvik Res. & Tech. Services

Res. & Tech. Solutions


HexScan 1010SDE


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Lithography, Via Generation, and Materials Processing Systems for Demanding Requirements


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Anvik Corporation presents its HexScanTM series of microlithography, via generation and materials processing systems. Incorporating Anvik's patented hexagonal seamless scanning technology and innovative system designs, the HexScan machines offer the unique combination of high-resolution projection imaging and large-area exposure capability. This makes them the ideal tools for high-volume, cost-effective production of a wide range of microelectronic and optoelectronic products.





Lithography Systems for Production of PCBs, MCMs and Other HDI Products

Designed to meet the requirements of fine-line PCBs and MCMs, these systems provide high resolution and precise alignment while using standard dry-film or liquid resists. Using an excimer laser, the systems deliver high throughput, even for soldermasks.

Recommended System Models:

HexScan 2100 SPE , HexScan 4050 SXE , HexScan 2020 SXE , HexScan 2150 SXE





Lithography Systems for Fabrication of Displays, Optoelectronics and MEMS

These systems enable the production of large-area displays, integrated optoelectronics and MEMS by eliminating the tradeoff between high-resolution projection imaging and panel size, while delivering high throughputs and maintaining low system costs.

Recommended System Models:

HexScan 2050 SME , HexScan 4050 SXE , HexScan 2020 SXE , HexScan 1010 SDE





Via Generation and Ablation Systems for Microelectronic Packaging Products

These laser ablation systems offer simultaneous, batch generation of tens of thousands of vias per second, independent of the sizes of the vias. They are also capable of 'dry' patterning structures in thin films of polymers, dielectrics, metals and other inorganics.

Recommended System Models:

HexScan 4050 SXE , HexScan 2150 SXE , HexScan 2100 SPE , HexScan 2020 SXE





Roll-to-Roll Lithography Systems for Flexible Electronics and Displays

Flexible circuits are enabling the manufacture of lighter, more durable and conformable products while significantly reducing production costs with roll-to-roll handling. These systems meet all of the challenges of patterning on continuous, flexible substrates.

Recommended System Models:

HexScan 3100 SRE





Materials Processing Systems for Laser Recrystallization and Annealing

Delivery of intense ultraviolet radiation with precise spatial control to a substrate can produce materials with superior structural properties. These systems are designed for recrystallization and annealing, enabling production of enhanced displays and TFTs.

Recommended System Models:

HexScan 4050 SXE. Also, contact Anvik for more information.





Optional Features (Available on all system models)

  • Variable-Area Substrate Tiling (VAST) to pattern smaller modules of different sizes without losing benefits of large-format processing.

  • Anamorphic X-Y Scaling (AXYS) to automatically compensate for dimensional changes in substrate.

  • Automatic mask and substrate handling - interfaced with user's mask and substrate carriers.

  • Autofocusing to accommodate different substrate thicknesses and substrate nonplanarity.

  • Automatic alignment - standard on most systems.




Select the HexScanTM system that's right for your application and your production requirements. With Anvik's comprehensive product lines, we are confident that in a wide majority of manufacturing scenarios, there is an ideal Anvik HexScan system that will give you unprecedented performance and deliver a lower cost of ownership than was ever thought possible before. Please contact Anvik or examine various available Anvik systems through the System Models link to determine which Anvik system meets your requirements best.






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