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IP-U.S. Pat. Office
A Track Record of Innovation


Selected Patents from Anvik Corporation's Intellectual Property Portfolio in Microelectronics Fabrication



Anvik Corporation's lithography, via-generation, and materials processing system business is based on several significant breakthroughs the Company has made in optical systems, lithography, and microelectronics process technologies. These innovations are protected by a rapidly growing patent portfolio that currently comprises 70 patents, of which 64 have been issued or allowed and 6 are pending. Selected patents from the Company's intellectual property portfolio are listed below.



  1. K. Jain, Large-Area, High-Throughput, High-Resolution, Projection Imaging System, U.S. Pat. 5,285,236, issued Feb. 8, 1994.

  2. K. Jain, Scan-and-Repeat, High-Resolution Lithography System, U.S. Pat. 4,924,257, issued May 8, 1990.

  3. K. Jain, High-Throughput, High-Resolution, Projection Patterning System for Large, Flexible, Roll-Fed, Electronic-Module Substrates, U.S. Pat. 5,652,645, issued Jul. 29, 1997.

  4. K. Jain, T. Dunn and J. Hoffman, Seamless, Maskless Lithography System Using Spatial Light Modulator, U.S. Pat. 6,312,134, issued Nov. 6, 2001.

  5. T. Dunn, N. Farmiga and K. Jain, Projection Patterning of Large Substrates Using Limited-Travel X-Y stage, U.S. Pat. 5,897,986, issued Apr. 27, 1999.

  6. K. Jain, Large-Area, High-Throughput, High-Resolution, Scan-and-Repeat, Projection Patterning System Employing Sub-Full Mask, U.S. Pat. 5,721,606, issued Feb. 24, 1998.

  7. K. Jain, Energy-Efficient Window, U.S. Pat. 6,094,306, issued Jul. 25, 2000.

  8. J. Hoffman, Unit-Magnification Projection Lens System, U.S. Pat. 5,696,631, issued Dec. 9, 1997.

  9. N. Farmiga and K. Jain, Three-Dimensional Universal Mounting Component System for Optical Breadboards, U.S. Pat. 5,825,558, issued Oct. 20, 1998.

  10. K. Jain, High Precision Alignment System for Microlithography, U.S. Pat. 4,991,962, issued Feb. 12, 1991.

  11. M. Zemel, Lithography System with Variable Area Substrate Tiling, U.S. Pat. 6,483,574, issued Nov. 19, 2002.

  12. K. Jain, S. Chandra and C. Kling, Fabry-Perot Probe Profilometer Having Feedback Loop to Maintain Resonance, U.S. Pat. 5,565,987, issued Oct. 15, 1996.






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