Technical Articles by Anvik Corporation on Projection Lithography and Via Generation Systems for Microelectronics Fabrication
Anvik Corporation's laser projection lithography and via-generation systems are designed for high-throughput production of a variety of microelectronic products that require high-resolution imaging with fine alignment on large-area substrates, including: flat-panel displays, prinetd circuit boards, flexible electronics, flexible displays, microvia products, wafer-level packages, microsystems, and optoelectronic devices. Anvik's technical team has authored several articles on these applications, some of which are listed below.
- J. Chae et al., "Patterning of Indium Tin Oxide by Projection Photoablation and Lift-Off Process for Fabrication of Flat-Panel Displays ", Appl. Phys. Lett., Vol. 90, No. 26, p. 261102, June 25, 2007. [Click here for a pdf copy of this article.]
- R. Huemoeller et al., "Unveiling the Next Generation in IC Substrate Circuit Formation", CircuiTree, Vol. 20, No. 6, p. 14, June 2007. [Click here for a pdf copy of this article.]
- K. Jain et al., "Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production", Proc. IEEE, Vol. 93, No. 8, p. 1500, Aug. 2005. [Click here for a pdf copy of this article.]
- K. Jain et al., "Large-Area, High-Resolution Lithography and Photoablation Systems for Microelectronics and Optoelectronics Fabrication", Proc. IEEE, Vol. 90, No. 10, p. 1681, Oct. 2002. [Click here for a pdf copy of this paper.]
- K. Jain et al., "Large-Area Excimer Laser Lithography and Photoablation Systems", Microlithography World, Vol. 11, No. 3, p. 8, Aug. 2002. [Click here for a pdf copy of this paper.]
- M. Klosner et al., "High-Resolution, Large-Area Projection Lithography Offers a New Alternative for Wafer-Level Packaging", Chip Scale Review, Vol. 6, No. 4, p. 75, Jul. 2002. [See also: www.ChipScaleReview.com]
- M. Zemel et al., "X-Y Scaling Compensation Technology for Fine-Line PCB Imaging with High-Precision Alignment", IPC Printed Circuit Expo, Proc. of Technical Conf., p. S03-1-1, Long Beach, CA, Mar. 26-28, 2002. [Click here for a pdf copy of this paper.]
- K. Jain et al., "High-Speed, High-Resolution, Large-Area Exposure System for PCB Patterning," Printed Circuit Fabrication, Vol. 20, No. 5, p. 34, May 1997.
- M. Robertsson et al., "Large-area patterning of high-density interconnects by novel UV-excimer lithography and photo-patternable ORMOCERTM dielectric," presented at the International Microelectronics and Packaging Society (IMAPS) Conference, Strasbourg, France, May 30-June 1, 2001. [Click here for a pdf copy of this paper.]
- K. Jain et al., "Large-Area, High-Throughput, High-Resolution Lithography Systems for Flat-Panel Displays and Microelectronic Modules," Proc. SPIE, Vol. 3331, p. 197, 1998.
- K. Jain et al., "Lithography on Flexible Substrates: A Roll-to-Roll, High-Throughput, High-Resolution System for Low-Cost Production of Microelectronics," Proc. SPIE, Vol. 3331, p. 207, 1998.
- K. Jain, "A Novel High-Resolution, Large-Field, Scan-and-Repeat Projection Lithography System," Proc. SPIE, Vol. 1463, p. 666, 1991.
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