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HexScan 1100 SWE



Lithography Systems
Biographical Sketch


Kanti Jain, Ph.D.

President and Founder





Kanti Jain



Dr. Kanti Jain is President and Founder of Anvik Corporation. He is also Professor Emeritus of Electrical and Computer Engineering at the University of Illinois at Urbana-Champaign.

Elected to the U.S. National Academy of Engineering, he is an internationally recognized scientist and technologist with over 35 years of contributions in the advancement of microelectronics manufacturing technologies, including at I.B.M., Hewlett-Packard, Raychem and Anvik.

In the 1980s, Dr. Jain invented and developed the technology of excimer laser lithography for which he received two Outstanding Innovation Awards from I.B.M. and which is now the dominant technology used worldwide in the production of microchips for computers, smart phones and other electronic devices. In the 1990s, he invented and developed the technologies for large-area lithography that are widely used today in the production of high-definition televisions, monitors and displays.

He received the Ph.D. in electrical engineering and solid-state physics from the University of Illinois at Urbana-Champaign in 1975, M.S. from the same institution in 1970, and B.Tech. (Hons.) from the Indian Institute of Technology, Kharagpur, in 1969. He was a Postdoctoral Fellow at M.I.T. from 1975 to 1977.

Dr. Jain is a Fellow of the American Association for the Advancement of Science, Life Fellow of the Institute of Electrical and Electronics Engineers, Fellow of the Optical Society of America, Fellow of the SPIE-The International Society for Optical Engineering, and recipient of the Richardson Medal of the Optical Society of America. He is the author of the book Excimer Laser Lithography and holds 70 patents.